Resonance phenomena in micro/nanoelectromechanical systems

Anna Foryś,

Andrzej S. Foryś

Abstrakt

In the paper, some aspects of nonlinearity of micro/nanoelectromechanical systems (MEMS/
NEMS) are presented. Because of great values of strains of micro/nanobeams the nonlinear
description is necessary. Particularly, the nonlinear inertia term is added to equation relating
to motion of the beam. Numerical calculations of resonance curves and instability regions
are given. Results are presented on graphs.

Słowa kluczowe: parametric resonance, stability, MEMS, NEMS, nonlinearities
References

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Foryś A., Optymalizacja układów mechanicznych w warunkach rezonansu parametrycznego oraz w rezonansach autoparametrycznych, Monografia 199, Politechnika Krakowska, Kraków 1996.